Litho AM Daily Report 8/29/06

Vilanova vilanova at stanford.edu
Tue Aug 29 08:50:52 PDT 2006


*Litho Tools Status                         *

*08/29/06*

* *

*AFM.....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND..................Problem-Top heater not Working. 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................Problem- Flat Finder Error. 
NIKON 9.................Shutdown- Flat Finder,Stage Error.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............
ULTRATECH2 ............. 
UVCURE..................
WBMISCRES...............
YES OVEN................*





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