Litho AM Daily Report 2/3/06

Eddy VIlanova Vilanova at snf.stanford.edu
Fri Feb 3 07:06:14 PST 2006


****Litho Tools Status*
2/03/06**

AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH...............
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................







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