AM Daily Report 2/7/06

Eddy VIlanova Vilanova at snf.stanford.edu
Tue Feb 7 07:47:25 PST 2006


****Litho Tools Status*
2/07/06**

AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH............... Problem - Unloaded sensor Error.
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................





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