Am Daily Report 2//08/06

Eddy VIlanova Vilanova at snf.stanford.edu
Wed Feb 8 07:20:35 PST 2006


*****Litho Tools Status*
2/08/06**
*
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH............... .
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................






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