Am Daily Report 2/9/06

Eddy VIlanova Vilanova at snf.stanford.edu
Thu Feb 9 06:56:42 PST 2006


**Litho Tools Status*
2/09/06**
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................Problem - Z Error During Alignemt Bond.
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH............... .
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................






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