Litho AM Daily Report 2/13/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Feb 13 07:18:36 PST 2006


****Litho Tools Status**
	2/13/06**
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................Problem - Resist on hotplate.
ULTRATECH............... .
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................






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