Litho AM Daily Report 2/13/06

[Eddy VIlanova]

****Litho Tools Status**
	2/13/06**
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................Problem - Resist on hotplate.
ULTRATECH............... .
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................