Am Daily Report 2/16/06

[Eddy VIlanova]

******Litho Tools Status**
	2/16/06****
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................Shutdown - Found Spindle motor Full of resist. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... .
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN....................