Am Daily Report 2/17/06

Eddy VIlanova Vilanova at snf.stanford.edu
Fri Feb 17 07:54:47 PST 2006


******Litho Tools Status**
	2/16/06****
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... .Problem - wafer sensor carriage.
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN....................





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