Lithyo AM Daily Report 2/21/06

Eddy VIlanova Vilanova at snf.stanford.edu
Tue Feb 21 08:17:02 PST 2006


*******Litho Tools Status**
	2/21/06*****
AFM.........................problem - Tip & Stage misalignment. 
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN....................






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