Litho AM Daily Report 2/23/06

Eddy VIlanova Vilanova at snf.stanford.edu
Thu Feb 23 06:49:25 PST 2006


********Litho Tools Status**
	2/23/06******
AFM.........................problem - Tip & Stage misalignment. 
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................Problem - Joystick & stage drifting.
NIKON 9.....................
SVGCOAT................... Problem- EBR Splashes on wafer. 
SVGCOAT2.................. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... .. Shutdown - Wafer Flat Error. 
ULTRATECH2..............Shutdown - COuld not reticle.
UVCURE.......................
WBMISCRES.................
YES OVEN....................






More information about the litho mailing list