Am Litho Daily Report 2/2/7/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Feb 27 08:59:05 PST 2006


******Litho Tools Status**
	2/27/06****
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................Problem _ Joystick  Not working Properly.
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... .Shutdown - wafer sensor carriage.
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN....................Shutdown - Maintenance in progress..





More information about the litho mailing list