Litho AM Daily Report 1/31/06

Eddy VIlanova Vilanova at snf.stanford.edu
Tue Jan 31 06:42:32 PST 2006


***Litho Tools Status*
1/31/06*

AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................
EVIMPRINT..............
EVBOND...................Problem - Airflow Error. 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH...............
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................





More information about the litho mailing list