From Vilanova at snf.stanford.edu Mon Jul 3 07:16:00 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 03 Jul 2006 07:16:00 -0700 Subject: Litho AM Daily Report 7/03/06 Message-ID: <44A926A0.9020401@snf.stanford.edu> ********Litho Tools Status** 07/03/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND..................Shutdown-Broken Wire Conductor,Part Will be here on July 5th. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Problem-Intermitent Mask Alignment error,NIkon Engineer will be here on July 5th. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-bad Interface Laser board,Waiting for Vendor to get part Numbers & Price. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Thu Jul 6 06:17:02 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 06 Jul 2006 06:17:02 -0700 Subject: Litho AM Daily Report 7/6/06 Message-ID: <44AD0D4E.5080208@snf.stanford.edu> ********Litho Tools Status** 07/06/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND..................Shutdown-Broken Wire Conductor,Part Has Been Order. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-bad Interface Laser board,Waiting for Vendor to get part Numbers & Price. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Fri Jul 7 06:45:16 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 07 Jul 2006 06:45:16 -0700 Subject: Litho AM Daily Report 7/07/06 Message-ID: <44AE656C.5020501@snf.stanford.edu> ********Litho Tools Status** 07/07/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND..................Shutdown-Broken Wire Conductor,Part Has Been Order. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2..............Shutdown-bad Interface Laser board,Waiting for Vendor to get part Numbers & Price. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Wed Jul 12 12:40:57 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 12 Jul 2006 12:40:57 -0700 Subject: Litho AM Daily Report 7/12/06 Message-ID: <44B55049.9060208@snf.stanford.edu> ********Litho Tools Status** 07/07/06 AFM..................... BLUE M..................Problem- ER-17 Error. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2..............Shutdown-Ultratech Engineering working on system. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Thu Jul 13 08:08:46 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 13 Jul 2006 08:08:46 -0700 Subject: Litho AM Daily Report 7/13/06 Message-ID: <44B661FE.8050902@snf.stanford.edu> *********Litho Tools Status** 07/13/06 * AFM..................... BLUE M................... DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2..............Shutdown-Work In Progress. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Tue Jul 18 07:46:55 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 18 Jul 2006 07:46:55 -0700 Subject: Litho AM Daily Report 7/18/06 Message-ID: <44BCF45F.7010207@snf.stanford.edu> **********Litho Tools Status** 07/18/06* AFM..................... BLUE M................... DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem-Focus Issues - Maintenance Adjusting & Running Short Step Focus. ULTRATECH2..............Shutdown-Power Supply On order. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Wed Jul 19 11:12:20 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 19 Jul 2006 11:12:20 -0700 Subject: Litho AM Daily Report 7/19/06 Message-ID: <44BE7604.8080702@snf.stanford.edu> **********Litho Tools Status** 07/19/06 AFM..................... BLUE M................... DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Shutdown-A/D Out of Range. ULTRATECH2..............Shutdown-Power Supply On order. UVCURE.................. WBMISCRES............... YES OVEN................ From nanotech at nsti.org Wed Jul 19 11:30:52 2006 From: nanotech at nsti.org (NSTI) Date: Wed, 19 Jul 2006 11:30:52 -0700 Subject: Nanotech 2006 Conference Proceedings Message-ID: Nanotech 2006 Conference Technical Proceedings The Most Comprehensive Up-To-Date Body of Work! http://www.nsti.org/procs/ Couldn't Attend This Year? You can still benefit from the knowledge generated at the NSTI Nanotech Conference Series through this special offer. - 4 CD Set Special ? 25% off - 3 CD Set Special ? 15% discount http://www.nsti.org/procs/ --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6802141K at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Tue Jul 25 08:33:37 2006 From: vilanova at stanford.edu (Vilanova) Date: Tue, 25 Jul 2006 08:33:37 -0700 Subject: Litho AM Daily Report 7/25/06 Message-ID: <44C639D1.2060701@stanford.edu> **********Litho Tools Status** 07/25/06 AFM..................... BLUE M................... DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem -Focus Out of Spec. ULTRATECH2..............Shutdown-Power Supply On order. UVCURE.................. WBMISCRES............... YES OVEN................ From vilanova at stanford.edu Fri Jul 28 07:58:09 2006 From: vilanova at stanford.edu (Vilanova) Date: Fri, 28 Jul 2006 07:58:09 -0700 Subject: Lirho AM Daily Report 7/28/06 Message-ID: <44CA2601.5030707@stanford.edu> ***********Litho Tools Status** 07/28/06 * AFM..................... BLUE M................... DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON................... NIKON 9.................Shutdown - Installation In progress. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2..............Shutdown-defective Laser head. UVCURE.................. WBMISCRES............... YES OVEN................ From nanotech at nsti.org Mon Jul 31 07:12:45 2006 From: nanotech at nsti.org (Nano World News) Date: Mon, 31 Jul 2006 07:12:45 -0700 Subject: Nano World News July 2006 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6802141K at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: