Litho AM Daily Report 7/03/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Jul 3 07:16:00 PDT 2006


********Litho Tools Status**
07/03/06

 

AFM.....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND..................Shutdown-Broken Wire Conductor,Part Will be here on July 5th.
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................Problem-Intermitent Mask Alignment error,NIkon Engineer will be here on July 5th.
NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH................
ULTRATECH2............Shutdown-bad Interface Laser board,Waiting for Vendor to get part Numbers & Price.
UVCURE..................
WBMISCRES...............
YES OVEN................






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