Litho AM Daily Report 7/25/06

Vilanova vilanova at stanford.edu
Tue Jul 25 08:33:37 PDT 2006


**********Litho Tools Status**
07/25/06

 

AFM.....................
BLUE M................... 
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND...................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................
NIKON 9.................Shutdown - Installation In progress.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............Problem -Focus Out of Spec.
ULTRATECH2..............Shutdown-Power Supply On order.
UVCURE..................
WBMISCRES...............
YES OVEN................






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