Lirho AM Daily Report 7/28/06

Vilanova vilanova at stanford.edu
Fri Jul 28 07:58:09 PDT 2006


***********Litho Tools Status**
07/28/06
*
 

AFM.....................
BLUE M................... 
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND...................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................
NIKON 9.................Shutdown - Installation In progress.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............
ULTRATECH2..............Shutdown-defective Laser head.
UVCURE..................
WBMISCRES...............
YES OVEN................







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