From Vilanova at snf.stanford.edu Thu Jun 1 06:40:55 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 01 Jun 2006 06:40:55 -0700 Subject: Litho AM Daily Report 6/01/06 Message-ID: <447EEE67.9020700@snf.stanford.edu> ************************Litho Tools Status************* 6/01/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN....................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Fri Jun 2 07:37:27 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 02 Jun 2006 07:37:27 -0700 Subject: Litho AM Daily Report 6/02/06 Message-ID: <44804D27.2050509@snf.stanford.edu> ************************Litho Tools Status************* 6/02/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN....................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From wuxinhua369 at vip.sina.com Fri Jun 2 19:48:31 2006 From: wuxinhua369 at vip.sina.com (wuxinhua369 at vip.sina.com) Date: Sat, 3 Jun 2006 10:48:31 +0800 Subject: =?gb2312?B?SU1QVURFTlQsIFNDT1VORFJFTCwgRHVQb250IG9mIHRoZSBVbml0ZWQgU3RhdGVzIc7es9yjrM7ewLWjrMPAufq2xbDuus262MD7tcMh?= Message-ID: <20060603RBnkLY8Bq.Gaf08N35O> A non-text attachment was scrubbed... Name: not available Type: multipart/alternative Size: 41682 bytes Desc: not available URL: From Vilanova at snf.stanford.edu Mon Jun 5 07:50:21 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 05 Jun 2006 07:50:21 -0700 Subject: Litho AM Daily Report 6/5/06 Message-ID: <448444AD.8040000@snf.stanford.edu> ************************Litho Tools Status************* 6/05/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN....................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Tue Jun 6 07:51:47 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 06 Jun 2006 07:51:47 -0700 Subject: Litho AM Daily Report 6/6/06 Message-ID: <44859683.8000109@snf.stanford.edu> ************************Litho Tools Status************* 6/06/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN....................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Wed Jun 7 07:31:30 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 07 Jun 2006 07:31:30 -0700 Subject: Litho AM Daily Report 6/7/06 Message-ID: <4486E342.6030708@snf.stanford.edu> ************************Litho Tools Status************* 6/07/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN....................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Thu Jun 8 09:29:23 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 08 Jun 2006 09:29:23 -0700 Subject: Litho Am Daily Report 6/8/06 Message-ID: <44885063.9090201@snf.stanford.edu> ************************Litho Tools Status************* 6/08/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN....................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................Problem _ Lightbulb Power Supply Failure. NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH....................Problem- Broken Diaphram. ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From zhangfanbei at 163.com Sat Jun 10 18:01:07 2006 From: zhangfanbei at 163.com (zhangfanbei) Date: Sun, 11 Jun 2006 09:01:07 +0800 Subject: IMPUDENT, SCOUNDREL, DuPont of the United =?GB2312?B?U3RhdGVzIc7es9yjrM7ewLWjrMPAufq2xbDuus262MD7tcMh?= Message-ID: IMPUDENT, SCOUNDREL, DuPont of the United States!??????????????! An open letter to American President Mr. Bush ?????????????? Explanation: Du Pont Chemical Company of the United State(in 2005 year )has for several times required to submit the dispute between it and our side to an arbitration organization. Respecting the requirement of Du Pont, we sent a version of ?Arbitration Agreement? in a registered letter to Du Pont on January 16, 2006, with an enclosure saying if Du Pont raises no objections, we will appreciate it if Du Pont sign and affix its seal to the agreement and mail the rest two copies back to us in 30 days. If Du Pont has objections, it may produce a version of its own. Meanwhile, we have sent the ?Arbitration Agreement? and an enclosure letter by e-mail to info.china at chn.dupont.com and info at dupont.com 24 times on January 26, February 6, February 10 and February 15, 2006 respectively. Now more than 30 days have passed, far exceeding the time that needs for finding proof and making a decision, and we have received no reply. This is most likely another trick played by Du Pont for the purpose of repudiating its debt. We therefore send this e-mail and ask for your pardon if it does any convenience to you. If possible, we request you tell Du Pont not to play this kind of trick any more. (As many people with the public relations department of the Du Pont Chemical Company excel at Chinese, the registered letter and e-mail we have sent are not translated into English.) IMPUDENT, SCOUNDREL, DuPont of the United States!??????????????! IMPUDENT, SCOUNDREL, CEO of DuPont Holliday ! DuPont Co. and its CEO Holliday are transnational scoundrel! Without open objection, DuPont is openly admitting itself to be a transnational scoundrel! We firmly believe that the United State is not a country that shields and connives at rascals and the American government is not a government that shields and connives at rascals! We request the American government actions to intensify the law enforcement strength to protect intellectual property rights,force transnational scoundrel DuPont to carry out it?s voluntarily promised obligations in the agreement. ************************************************************************************************* Hello, my respectable President Mr. Bush: The fact that DuPont declined to fulfill the agreement has been presented to you for several times via president at whitehouse.gov; As a result, president at whitehouse.gov sent back three letters containing the following same contents on the behalf of Mr. President in Sep 2004:?Thank you for e-mailing President Bush. Your ideas and comments are very important to him.? My ?ideas and comments? are as follows: it is verified by Mr. Huang with adequate facts and irrefutable legal evidences that DuPont must disburse Mr. Huang patent fee, license fee or equivalent ?Utter Compensation? fee and DuPont?s persistent refusal to disburse these fees infringes upon the intellectual property rights of Mr. Huang. president at whitehouse.gov mentioned ?are very important to him.? I don?t dare to unduly surmise the meaning of ?very important? to Mr. President; However, according to my humble opinions, there exits the following ?important?: on the one hand, respectable Mr. President, the American Government led by Mr. President as well as the great American people bitterly hate the predation of the intellectual property rights of others through brazen means such as stealing, shameless acts; in contrast, DuPont is committing such brazen and shameless deals; on the other hand, the number of your country?s intellectual property rights in a variety of fields is far in excess of that of any nations in the world and suffers greatly from rights infringement. Therefore, your government always reserves no efforts in urging other nations to intensify the law enforcement strength to protect your country?s intellectual property rights. However, while your government reserves no efforts in urging the Chinese government to intensify the law enforcement strength to protect your country?s intellectual property rights and receives your ?more encouraged? praise, DuPont is infringing the intellectual property rights of Mr. Huang through various extremely brazen and shameless means, which constitutes an extremely bad signal to the governments and public of other nations in the world, a extremely ?good? model for current and potential thieves of intellectual property rights, SETTING Dupont AS AN EXAMPLE, COMPANIES AND PUBLIC OF OTHER COUNTRIES IN THE WORLD WILL MISAPPREHEND THAT THEY TOTALLY HAVE THE RIGHT TO INFRINGE THE INTELLECTUAL PROPERTY OF YOUR COUNTRY WITHOUT ANY FEAR, SUCH AS FAKE VIDEO PRODUCTS AND BRANDS,PLAGIARIZE PATENT,an enormous damage to your government protection of your country?s intellectual property rights, and a tremendous humiliation to your country?s lofty status in the world. For the sake of the glory of the great American people and the reputation of a legion of American corporations, in order to safeguard your country?s lofty status in the world and protect the intellectual property rights of your country and other nations in the world, we humbly request you and your government to prevent DuPont?s such extremely brazen infringement and even seizure behaviors, and force DuPont to carry out it?s voluntarily promised obligations in the agreement. We firmly believe that the United State is not a country that shields and connives at rascals and the American government is not a government that shields and connives at rascals; Under the instruction of our respectable Mr. President and the American government, the rascal of DuPont shall be aware of shame and be able to turn into a normal corporation by giving up shameless behaviors. Due to the adequate evidences, the clear-cut rights and obligations of both parties of DuPont and Mr. Huang, and simple legal relations, the infringement of the intellectual property rights of Mr. Huang by DuPont can be absolutely prevented and DuPont will surely disburse Mr. Huang patent fee, license fee or equivalent ?Utter Compensation? fee as long as your government intensifies the law enforcement strength to protect intellectual property rights as well. With best regards! Annex: Heartfelt thanks for your reading my E-mail and your mail of attention to this matter. I would like to make some replenishment concerning the matter, for you to judge and decide. I Abstract 1. At the request of Du Pont, Mr. Huang has for 10 times submitted written technical materials to Du Pont from April 1993 to 1994, for expert group of Du Pont to conduct feasibility analysis. 2. On February 22, 1995, Dr Robert F Sklar, Technology Transfer Licensing Manager of DuPont arrived in Shanghai in China, to ?sign many agreements? with Mr. Huang. Mr. Huang insisted DuPont examines samples first before signs any agreement. However, as samples were still in the process of purification at the time, no agreements were signed then. 3. On March 28, 1995, Mr. Huang sent the first batch of samples to Du Pont by post. 4. On September 7, 1995, Mr. Huang received ?Biological Evaluation Agreement? (1995 Agreement) sent by Du Pont, requiring Mr. Huang to sign this agreement and again provide samples. Mr. Huang signed the agreement and sent second batch of samples as requested by DuPont. DuPont admit in Article 5 of the ?1995 Agreement? that Mr. Huang will be entitled to claim patent and licensing fees. DuPont states in Article 8 of the ?1995 Agreement? that Mr. Huang may not cooperate with any universities or enterprises in any form before and after signing of this agreement (for this reason, Mr. Huang has refused cooperation request of several companies). 5. On September 10, 1998, DuPont sent a letter to Mr. Huang, asking for third batch of samples. 6. In 1999, DuPont carried out a month-long insecticide screening on the third batch of samples (in fact, it has carried out weeds killing test and mould killing test in the meantime), and required to keep all these tests a secret. 7. On June 8, 2000, DuPont sent a letter saying it was not interested in samples provided by Mr. Huang, and refused to pay Mr. Huang patent and licensing fees. 8.The mail signed by DuPont on June 2th, 2005, threaten Mr.Huang ,and prevent Mr.Huang send the E-mail. Seek response from E-mail: info at dupont.com http://www1.dupont.com/NASApp/dupontglobal/corp/contactEmail.jsp info.china at chn.dupont.com ?????????????? ??? ?????????????2005??????????????????????????????????????2006.01.16.?????????????????????????????????????30????????????????????????????????????????2006.01.26.,2006.02.06.?2006.02.10.?2006.02.15.????????????24?????info.china at chn.dupont.com?info at dupont.com??????????30???????????????????????????????????????????????????????e-mail?????????????????????????????????????????? ??????????! ???????????????! ?????????????????????! ??????????,???????????????????????! ????????????????????????????????????????? ???????????????????????????????????????? ************************************************************************************************* ????????????? ?????????????????president at whitehouse.gov?????president at whitehouse.gov?? 2004?9??????????????????????Thank you for e-mailing President Bush. Your ideas and comments are very important to him.????ideas and comments????????????????????????????????????????????????????????????????????????????????president at whitehouse.gov??are very important to him.? ?very important??????????????????????????????important? ? 1.????????????????????????????????????????????????????????????????????????? 2.???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????,????????????????????,????????????????????????????????????????????? ???????????????????????????????????????????????? ???????????????????????????????????????????????? ????????? ???????????????????????????????????????????????? ????????????????????????????????????????????? ???????????????????????????????????????????????? ??????????????????????????????????????????????????????????????????? ?? ??????? ?????? Chinese SXF 2005.09.17.23?59 ?? 1. ?1993?4???1994??????????????????10???????????????? ?????? 2. 1995?2?22?????????????Sklar?? ?E.I.DU PONT DE NEMOURS AND COMPANY Robert F. Sklar Ph. D. Manager,Technology Transfer Licensing)??????????????????????????????????????????????????????????? 3 1995?3?28???????????????? 4. 1995?9?7????????????BIOLOGICAL EVALUATION AGREEMENT?1995???)?????????????????????????????????????????????????1995?????5??????????????????????????????????1995?????8?????????????????????????????????????????? ???? 5. 1998?9?10?????????????????? 6 1999????????????????Insecticide Screening??????????????????????????????????????? 7. 2000?6?8?????????????????,????????????????? 8.2005.06.02. ???????????????-??????????E-mail? (??E-mail????? info.china at chn.dupont.com , ????Contact Us:info at dupont.com http://www1.dupont.com/NASApp/dupontglobal/corp/contactEmail.jsp) ?????????/???????????? ************************************************************************************************* ?????????????????????????????????????!??!!????!!! ?????????????,?????????????????????! *???,????* *????????????????????????????!!!!!!!!!!!!!!!!!??????... **???,??!???,??! *?????????????????????????????????????! * ???????????????????????????????????????????????????????????????! ************************************************************************************************* From Vilanova at snf.stanford.edu Fri Jun 16 07:08:58 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 16 Jun 2006 07:08:58 -0700 Subject: Litho AM Daily Report 6/16/06 Message-ID: <4492BB7A.3070609@snf.stanford.edu> *Litho Tools Status** 06/016/06* AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN.................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1.................... NANO2................... NIKON...................Problem- Wafer reticle Aligment error. NIKON 9.................Problem- Z Motor Broken . SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Shutdown- Under Repair. ULTRATECH2............Shutdown-Doesn?t Take Some Of the Reticles. UVCURE.................. WBMISCRES............... YES OVEN................** * * From Vilanova at snf.stanford.edu Tue Jun 20 07:15:15 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 20 Jun 2006 07:15:15 -0700 Subject: Litho AM Daily Report 6/20/06 Message-ID: <449802F3.3010004@snf.stanford.edu> **Litho Tools Status** 06/20/06** AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN.................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1.................... NANO2................... NIKON...................Problem- Wafer reticle Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Intallation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-Ultratech Eng Will be here on 6/22/06 to work on it. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Wed Jun 21 09:36:10 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 21 Jun 2006 09:36:10 -0700 Subject: Litho AM Daily Report 6/21/06 Message-ID: <4499757A.7080401@snf.stanford.edu> **Litho Tools Status** 06/21/06** AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN.................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1.................... NANO2................... NIKON...................Problem- Wafer reticle Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-Ultratech Eng. Will be here on 6/22/06 to work on it. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Thu Jun 22 06:27:51 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 22 Jun 2006 06:27:51 -0700 Subject: Litho AM Daily Report 6/22/06 Message-ID: <449A9AD7.4000300@snf.stanford.edu> ***Litho Tools Status** 06/22/06* AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Problem- Wafer reticle Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-Ultratech Eng. Will be here Today 6/22/06 to work on it. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Fri Jun 23 07:37:17 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 23 Jun 2006 07:37:17 -0700 Subject: Litho AM Daily Report 6/23/06 Message-ID: <449BFC9D.6020706@snf.stanford.edu> ****Litho Tools Status** 06/23/06* AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Problem- Wafer reticle Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2.................Shutdown- broken I/O board ULTRATECH................ ULTRATECH2............Shutdown-Bad 24 Volts Power Supply. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Mon Jun 26 07:53:00 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 26 Jun 2006 07:53:00 -0700 Subject: Litho AM Daily Report 6/26/06 Message-ID: <449FF4CC.1000506@snf.stanford.edu> *****Litho Tools Status** 06/26/06* AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Problem-Intermitent Mask Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-Power Supply has been Order. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Mon Jun 26 09:55:49 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 26 Jun 2006 09:55:49 -0700 Subject: Hotplates and Ovens Monthly Calibration ( 6/26/06) Message-ID: <44A01195.9090609@snf.stanford.edu> The message is ready to be sent with the following file or link attachments: Hotplates and Ovens Monthly Calibration Note: To protect against computer viruses, e-mail programs may prevent sending or receiving certain types of file attachments. Check your e-mail security settings to determine how attachments are handled. -------------- next part -------------- A non-text attachment was scrubbed... Name: Hotplates and Ovens Monthly Calibration.doc Type: application/msword Size: 20992 bytes Desc: not available URL: From Vilanova at snf.stanford.edu Mon Jun 26 10:00:11 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 26 Jun 2006 10:00:11 -0700 Subject: Ovens and Hotplates Monthly Calibration 6/26/06 Message-ID: <44A0129B.1060404@snf.stanford.edu> *Hotplates and Ovens Monthly Calibration* 6/26/06 ( Reading After Calibration ) Coater Track I ( HMDS ) Set Point 125 .C 125.9.C Coater Track II ( HMDS) Set Point 125.C 124.7.C Coater Track I Post Bake Set Point 90.C 88.6.C Coater Track II Post Bake Set Point 90.C 90.6.C Developer Track I Set Point 110oC 110.4.C Developer Track II Set Point 110oC 108.4.C Set Point -?90.C Pre-Bake Hotplate 88.4.C Set Point -? 115.C Pre- Bake Hotplate 114.3.C 90.C Pre Bake Oven 90.4.C 110.C Post Bake Oven 110.7.C 150.C Singe Oven 152.6.C From Vilanova at snf.stanford.edu Tue Jun 27 06:35:50 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 27 Jun 2006 06:35:50 -0700 Subject: Litho AM Daily Report 6/27/06 Message-ID: <44A13436.2060600@snf.stanford.edu> ******Litho Tools Status** 06/27/06* AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Problem-Intermitent Mask Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-Power Supply has been Order. UVCURE.................. WBMISCRES............... YES OVEN................ From Vilanova at snf.stanford.edu Wed Jun 28 06:58:39 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 28 Jun 2006 06:58:39 -0700 Subject: Litho AM Daily Report 6/28/06 Message-ID: <44A28B0F.3060907@snf.stanford.edu> *******Litho Tools Status** 06/28/06 * AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Problem-Intermitent Mask Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-bad Interface Laser board. UVCURE.................. WBMISCRES............... YES OVEN................ From nanotech at nsti.org Wed Jun 28 10:04:14 2006 From: nanotech at nsti.org (Nano World News) Date: Wed, 28 Jun 2006 10:04:14 -0700 Subject: Nano World News May-June 2006 Message-ID: An HTML attachment was scrubbed... URL: From Vilanova at snf.stanford.edu Thu Jun 29 08:30:41 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 29 Jun 2006 08:30:41 -0700 Subject: Litho AM Daily Report 6/29/06 Message-ID: <44A3F221.1070606@snf.stanford.edu> ********Litho Tools Status** 06/29/06* AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Problem-Intermitent Mask Alignment error. NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2............Shutdown-bad Interface Laser board. UVCURE.................. WBMISCRES............... YES OVEN................