Litho AM Daily Report 6/6/06

Eddy VIlanova Vilanova at snf.stanford.edu
Tue Jun 6 07:51:47 PDT 2006


************************Litho Tools Status*************
		  6/06/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN....................... 
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................
ULTRATECH2...................Shutdown- Reticle Loader Software Problem.
UVCURE.......................
WBMISCRES....................
YES OVEN.....................







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