Litho Am Daily Report 6/8/06

Eddy VIlanova Vilanova at snf.stanford.edu
Thu Jun 8 09:29:23 PDT 2006


************************Litho Tools Status*************
		  6/08/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN....................... 
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................Problem _ Lightbulb Power Supply Failure.
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................Problem- Broken  Diaphram.
ULTRATECH2...................Shutdown- Reticle Loader Software Problem.
UVCURE.......................
WBMISCRES....................
YES OVEN.....................






More information about the litho mailing list