Litho AM Daily Report 6/16/06

Eddy VIlanova Vilanova at snf.stanford.edu
Fri Jun 16 07:08:58 PDT 2006


*Litho Tools Status**
06/016/06*

 

AFM.....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN..................
EVIMPRINT...............
EVBOND..................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1....................
NANO2...................
NIKON...................Problem- Wafer reticle Aligment error.
NIKON 9.................Problem- Z Motor Broken .
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............Shutdown- Under Repair.
ULTRATECH2............Shutdown-Doesn’t Take Some Of the Reticles.
UVCURE..................
WBMISCRES...............
YES OVEN................**

* *




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