Litho AM Daily Report 6/21/06

Eddy VIlanova Vilanova at snf.stanford.edu
Wed Jun 21 09:36:10 PDT 2006


**Litho Tools Status**
06/21/06**

 

AFM.....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN..................
EVIMPRINT...............
EVBOND..................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1....................
NANO2...................
NIKON...................Problem- Wafer reticle Alignment error.
NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH................
ULTRATECH2............Shutdown-Ultratech Eng. Will be here on 6/22/06 to work on it.
UVCURE..................
WBMISCRES...............
YES OVEN................





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