Litho AM Daily Report 6/26/06

[Eddy VIlanova]

*****Litho Tools Status**
06/26/06*

 

AFM.....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND..................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................Problem-Intermitent Mask Alignment error.
NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH................
ULTRATECH2............Shutdown-Power Supply has been Order.
UVCURE..................
WBMISCRES...............
YES OVEN................