Ovens and Hotplates Monthly Calibration 6/26/06
Eddy VIlanova
Vilanova at snf.stanford.edu
Mon Jun 26 10:00:11 PDT 2006
*Hotplates and Ovens Monthly Calibration*
6/26/06
( Reading After Calibration )
Coater Track I ( HMDS ) Set Point 125 .C 125.9.C
Coater Track II ( HMDS) Set Point 125.C 124.7.C
Coater Track I Post Bake Set Point 90.C 88.6.C
Coater Track II Post Bake Set Point 90.C 90.6.C
Developer Track I Set Point 110oC 110.4.C
Developer Track II Set Point 110oC 108.4.C
Set Point -à90.C Pre-Bake Hotplate 88.4.C
Set Point -à 115.C Pre- Bake Hotplate 114.3.C
90.C Pre Bake Oven
90.4.C
110.C Post Bake Oven
110.7.C
150.C Singe Oven
152.6.C
More information about the litho
mailing list