Litho AM Daily Report 6/28/06

Eddy VIlanova Vilanova at snf.stanford.edu
Wed Jun 28 06:58:39 PDT 2006


*******Litho Tools Status**
06/28/06
*
 

AFM.....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND..................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................Problem-Intermitent Mask Alignment error.
NIKON 9.................Shutdown - Waiting for New Z motor and Encoder Installation.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH................
ULTRATECH2............Shutdown-bad Interface Laser board.
UVCURE..................
WBMISCRES...............
YES OVEN................






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