Litho AM Daily Report 3/1/06

Eddy VIlanova Vilanova at snf.stanford.edu
Wed Mar 1 11:53:54 PST 2006


********Litho Tools Status**
	3/01/06******
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON........................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. _ problem - Right Eye out of focus.
UVCURE.......................
WBMISCRES.................
YES OVEN......................





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