Litho AM Daily Report 3/2/06

Eddy VIlanova Vilanova at snf.stanford.edu
Thu Mar 2 06:45:50 PST 2006


*********Litho Tools Status**
	3/02/06*******
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON........................Problem - Stage shifting during alignment.
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . problem - Right Eye out of focus.
UVCURE.......................
WBMISCRES.................
YES OVEN......................





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