Litho AM Daily Report 3/6/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Mar 6 06:47:31 PST 2006


**********Litho Tools Status**
	3/06/06********
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.........................
NIKON 9.....................
SVGCOAT...................Problem - Thicker Resist cybor Pump sent out for repair. 
SVGCOAT2..................Problem-Pump Sent out for repair. 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . .
UVCURE.......................
WBMISCRES.................
YES OVEN......................







More information about the litho mailing list