Litho Am Daily Report 3/10/06

Eddy VIlanova Vilanova at snf.stanford.edu
Fri Mar 10 06:53:24 PST 2006


**************Litho Tools Status*************
			3/10/06***
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.........................
NIKON 9.....................
SVGCOAT...................Problem - Thicker Resist cybor Pump sent out for repair.  :-(  
SVGCOAT2................... 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . .
UVCURE.......................
WBMISCRES.................
YES OVEN......................

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