Litho AM Daily Report 3/27/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Mar 27 06:56:35 PST 2006


*******************Litho Tools Status*************
		  3/27/06***
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... Problem - Turbo Pump  Out for Repair. 
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............Problem - X Micrometer Out Of Alignment. 
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.........................
NIKON 9.....................
SVGCOAT.................... 
SVGCOAT2.................... 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . .
UVCURE.......................
WBMISCRES.................
YES OVEN......................





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