From Vilanova at snf.stanford.edu Mon May 1 06:33:19 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 01 May 2006 06:33:19 -0700 Subject: Litho AM Daily Report 5/01/06 Message-ID: <44560E1F.2010902@snf.stanford.edu> ************************Litho Tools Status************* 5/01/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R...............Shutdown - Controller Out for Repair. . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON......................... NIKON 9..................... SVGCOAT....................Shutdown - Bad CPU Board, Waiting for Replacement. SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN......................* From Vilanova at snf.stanford.edu Tue May 2 08:28:44 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 02 May 2006 08:28:44 -0700 Subject: Litho AM Daily Report 5/2/06 Message-ID: <44577AAC.4030108@snf.stanford.edu> ************************Litho Tools Status************* 5/02/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R...............Shutdown - Controller Out for Repair. . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON......................... NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN......................* From nanotech at nsti.org Tue May 2 18:30:57 2006 From: nanotech at nsti.org (Nanotech 2006) Date: Tue, 2 May 2006 18:30:57 -0700 Subject: Network With 3000 Colleagues Next Week Message-ID: Nanotech 2006 May 7-11, Boston, Massachusetts http://www.nsti.org/Nanotech2006 The 9th annual NSTI Nanotech 2006, the premier nanotechnology conference and trade show in the U.S., will take place May 7-11, 2006 at the Hynes Convention Center, Boston, Massachusetts. The largest and most comprehensive nanotechnology event in the U.S., Nanotech 2006 will host over 3,000 attendees, 300 exhibitors, 900 business & research presentations, and 60+ Nanotech Ventures. Over 60 early stage nanotech companies will be presenting within the Nanotech 2006 Early Stage Company and Investment Review. The Nanotech 2006 Scientific Program is the most respected nano event in the U.S., with endorsements from top U.S. and European societies, research agencies and fortune 500 companies. This year?s program is schedule with special industry focused symposia. These include sessions on the Health Care, Biotechnology, Materials, Surface sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. Workshops and Ventures events this year include: Nano Industrial Impact Workshop ? Sunday May 7 One-Day Intensive Program to educate participants in the current state of the art in a range of nanotechnologies and impacted industries. All courses are presented by leading experts in their respective fields. Nanotech Ventures Emerging Company Review ? May 8 - 10 Join the Nanotech Ventures community in participating in the world's largest nanotechnology venture forum. 50 Early Stage Companies Presenting in most every high-tech industrial sector. Clean & Controlled Environments ? May 8 - 10 Industry leading event for cleanrooms, contamination management and controlled environments for small particles. Conference and Symposia this year include: Nanoscale Electronics & Microsystems ? Nano Electronics & Photonics ? Nano Fabrication ? MEMS & NEMS ? Sensors & Systems ? Micro & Nano Fluidics ? MSM - Modeling Microsystems ? WCM - Compact Modeling Nanoscale Materials & Technologies ? Nanostructured Materials & Devices ? Soft Nanotechnologies & Applications ? Polymer Nanotechnology ? Carbon Nano Structures & Devices ? Nano Particles & Applications ? Composites & Interfaces ? Energy Technologies & Applications ? Environment & Society ? ICCN - Nanoscale Modeling ? Nanoscale Characterization Nanotech in Life Science & Medicine ? Bio Nano Materials & Tissue Engineering ? Bio Sensors & Diagnostics ? Biomarkers & Nanoparticles ? Cancer Diagnostics, Imaging & Treatment ? Cellular & Molecular Dynamics ? Computational & Modeling - ICCN ? Drug Delivery & Therapeutics ? Imaging ? Nano Medicine ? Nanotech to Neurology Clean & Controlled Environments ? Clean & Controlled Environments Business, Partnering, Policy ? Investment, Licensing, Partnering ? Initiatives, Education & Policy For more information please visit: http://www.nsti.org/Nanotech2006 --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6802141K at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vilanova at snf.stanford.edu Wed May 3 13:21:41 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 03 May 2006 13:21:41 -0700 Subject: Litho AM Daily report 5/3/06 Message-ID: <445910D5.5040908@snf.stanford.edu> ************************Litho Tools Status************* 5/03/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R................ . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON.........................Problem - not able to run second layer. NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN...................... From Vilanova at snf.stanford.edu Fri May 5 06:55:28 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 05 May 2006 06:55:28 -0700 Subject: Litho AM Daily Report 5/5/06 Message-ID: <445B5950.2050809@snf.stanford.edu> ************************Litho Tools Status************* 5/05/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R................ . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON.........................Problem - not able to run second layer. NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN...................... From Vilanova at snf.stanford.edu Mon May 8 07:51:48 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 08 May 2006 07:51:48 -0700 Subject: Litho Am Daily Report 5/08/06 Message-ID: <445F5B04.5020002@snf.stanford.edu> ************************Litho Tools Status************* 5/08/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R................ . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON.........................Problem - not able to run second layer. NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN...................... From Vilanova at snf.stanford.edu Tue May 9 07:02:42 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 09 May 2006 07:02:42 -0700 Subject: Litho AM Daily Report 5/09/06 Message-ID: <4460A102.7050206@snf.stanford.edu> ************************Litho Tools Status************* 5/09/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R................ . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON.........................Problem - not able to run second layer. NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN...................... From Vilanova at snf.stanford.edu Wed May 10 07:11:25 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 10 May 2006 07:11:25 -0700 Subject: Litho AM Daily Report 5/10/06 Message-ID: <4461F48D.6060103@snf.stanford.edu> ************************Litho Tools Status************* 5/10/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R................ . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON.........................Problem - not able to run second layer. NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN...................... From Vilanova at snf.stanford.edu Thu May 11 06:52:18 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 11 May 2006 06:52:18 -0700 Subject: Litho AM Daily report 5/11/06 Message-ID: <44634192.3020004@snf.stanford.edu> ************************Litho Tools Status************* 5/11/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R................ . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON.......................... NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN...................... From Vilanova at snf.stanford.edu Fri May 12 08:54:10 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 12 May 2006 08:54:10 -0700 Subject: Litho AM Daily Report 5/12/06 Message-ID: <4464AFA2.2070304@snf.stanford.edu> ************************Litho Tools Status************* 5/12/06 AFM.........................Problem -Scanner sent out for repair :-( . BLUE M................... DEKTAK CLEAN..... DEKTAK AU............ DNS.......................... ELLIPSOMETER............. . ELP1......................... ELP2......................... EVALIGN................... EVIMPRINT.............. EVBOND.................... . FUSION..................... LAURELL L............... LAURELL R................ . HEADWAY2............... KARLSUSS................. KARLSUSS2................ KSBONDER................ LITHOSOLV............... MASKSCRUB............. NANO1....................... NANO2....................... NIKON.......................... NIKON 9..................... SVGCOAT..................... SVGCOAT2.................... SVGDEV...................... SVGDEV2...................... ULTRATECH............... .. ULTRATECH2.............. . . UVCURE....................... WBMISCRES................. YES OVEN...................... From Vilanova at snf.stanford.edu Mon May 15 07:15:08 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Mon, 15 May 2006 07:15:08 -0700 Subject: Litho AM Daily Report 5/15/06 Message-ID: <44688CEC.4060507@snf.stanford.edu> ************************Litho Tools Status************* 5/15/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN...................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2................... UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Tue May 16 07:56:53 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 16 May 2006 07:56:53 -0700 Subject: Litho AM Daily Report 5/16/06 Message-ID: <4469E835.5020601@snf.stanford.edu> ************************Litho Tools Status************* 5/16/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN...................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2................... UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Thu May 18 06:57:24 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 18 May 2006 06:57:24 -0700 Subject: Litho AM Daily Report 5/18/06 Message-ID: <446C7D44.4080500@snf.stanford.edu> ************************Litho Tools Status************* 5/18/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN...................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH....................Problem-Reticle Vacuum Error-3 ULTRATECH2...................problem-Doesn't Take Some Of The Reticles. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Fri May 19 07:21:43 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 19 May 2006 07:21:43 -0700 Subject: Litho AM Daily Report 5/19/06 Message-ID: <446DD477.1040604@snf.stanford.edu> ************************Litho Tools Status************* 5/19/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN...................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................problem-Doesn't Take Some Of The Reticles. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Tue May 23 06:42:59 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 23 May 2006 06:42:59 -0700 Subject: Litho AM Daily Report 5/23/06 Message-ID: <44731163.1020209@snf.stanford.edu> ************************Litho Tools Status************* 5/23/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN......................Problem-Shutter System Intermitently Getting Stuck. EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................problem-Doesn't Take Some Of The Reticles. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Wed May 24 07:01:51 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 24 May 2006 07:01:51 -0700 Subject: Litho Am Daily Report 5/24/06 Message-ID: <4474674F.6080704@snf.stanford.edu> ************************Litho Tools Status************* 5/24/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN......................Problem-Shutter System Intermitently Getting Stuck. EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Thu May 25 06:52:20 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 25 May 2006 06:52:20 -0700 Subject: Litho AM Daily Report 5/25/06 Message-ID: <4475B694.1030701@snf.stanford.edu> ************************Litho Tools Status************* 5/25/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN......................Problem-Shutter System Intermitently Getting Stuck. EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN..................... From Vilanova at snf.stanford.edu Tue May 30 08:13:06 2006 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Tue, 30 May 2006 08:13:06 -0700 Subject: Litho AM Daily Report 5/30/06 Message-ID: <447C6102.9040500@snf.stanford.edu> ************************Litho Tools Status************* 5/30/06 AFM.......................... BLUE M....................... DEKTAK CLEAN................. DEKTAK AU.................... DNS.......................... ELLIPSOMETER................. ELP1......................... ELP2......................... EVALIGN....................... EVIMPRINT.................... EVBOND....................... FUSION....................... LAURELL L.................... LAURELL R.................... HEADWAY2..................... KARLSUSS..................... KARLSUSS2.................... KSBONDER..................... LITHOSOLV.................... MASKSCRUB.................... NANO1........................ NANO2........................ NIKON........................ NIKON 9...................... SVGCOAT...................... SVGCOAT2..................... SVGDEV....................... SVGDEV2...................... ULTRATECH.................... ULTRATECH2...................Shutdown- Reticle Loader Software Problem. UVCURE....................... WBMISCRES.................... YES OVEN.....................