Litho Am Daily Report 5/08/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon May 8 07:51:48 PDT 2006


************************Litho Tools Status*************
		  5/08/06
AFM.........................Problem  -Scanner sent out for repair :-( .
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER............. .  
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... .  
FUSION.....................
LAURELL L...............
LAURELL R................ . 
HEADWAY2...............
KARLSUSS.................
KARLSUSS2................ 
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.........................Problem - not able to run second layer. 
NIKON 9.....................
SVGCOAT..................... 
SVGCOAT2.................... 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . .
UVCURE.......................
WBMISCRES.................
YES OVEN......................






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