Litho AM Daily Report 5/15/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon May 15 07:15:08 PDT 2006


************************Litho Tools Status*************
		  5/15/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN......................
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................
ULTRATECH2...................
UVCURE.......................
WBMISCRES....................
YES OVEN.....................








More information about the litho mailing list