Litho AM Daily Report 5/16/06

Eddy VIlanova Vilanova at snf.stanford.edu
Tue May 16 07:56:53 PDT 2006


************************Litho Tools Status*************
		  5/16/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN......................
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................
ULTRATECH2...................
UVCURE.......................
WBMISCRES....................
YES OVEN.....................






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