Litho AM Daily Report 5/18/06

Eddy VIlanova Vilanova at snf.stanford.edu
Thu May 18 06:57:24 PDT 2006


************************Litho Tools Status*************
		  5/18/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN......................
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................Problem-Reticle Vacuum Error-3
ULTRATECH2...................problem-Doesn't Take Some Of The Reticles.
UVCURE.......................
WBMISCRES....................
YES OVEN.....................





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