Litho AM Daily Report 5/18/06

[Eddy VIlanova]

************************Litho Tools Status*************
		  5/18/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN......................
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................Problem-Reticle Vacuum Error-3
ULTRATECH2...................problem-Doesn't Take Some Of The Reticles.
UVCURE.......................
WBMISCRES....................
YES OVEN.....................