Litho AM Daily Report 5/19/06

Eddy VIlanova Vilanova at snf.stanford.edu
Fri May 19 07:21:43 PDT 2006


************************Litho Tools Status*************
		  5/19/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN......................
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................
ULTRATECH2...................problem-Doesn't Take Some Of The Reticles.
UVCURE.......................
WBMISCRES....................
YES OVEN.....................






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