Litho AM Daily Report 5/25/06

Eddy VIlanova Vilanova at snf.stanford.edu
Thu May 25 06:52:20 PDT 2006


************************Litho Tools Status*************
		  5/25/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN......................Problem-Shutter System Intermitently Getting Stuck. 
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................
ULTRATECH2...................Shutdown- Reticle Loader Software Problem.
UVCURE.......................
WBMISCRES....................
YES OVEN.....................





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