Litho AM Daily Report 5/30/06

Eddy VIlanova Vilanova at snf.stanford.edu
Tue May 30 08:13:06 PDT 2006


************************Litho Tools Status*************
		  5/30/06
AFM..........................
BLUE M.......................
DEKTAK CLEAN.................
DEKTAK AU....................
DNS..........................
ELLIPSOMETER.................  
ELP1.........................
ELP2.........................
EVALIGN....................... 
EVIMPRINT....................
EVBOND.......................  
FUSION.......................
LAURELL L....................
LAURELL R....................
HEADWAY2.....................
KARLSUSS.....................
KARLSUSS2....................
KSBONDER.....................
LITHOSOLV....................
MASKSCRUB....................
NANO1........................
NANO2........................
NIKON........................ 
NIKON 9......................
SVGCOAT......................
SVGCOAT2.....................
SVGDEV.......................
SVGDEV2......................
ULTRATECH....................
ULTRATECH2...................Shutdown- Reticle Loader Software Problem.
UVCURE.......................
WBMISCRES....................
YES OVEN.....................





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