Litho AM Daily Report 11/14/06

Vilanova vilanova at stanford.edu
Tue Nov 14 07:20:08 PST 2006


**Litho Tools Status*                         

*11/14/06**


AFM....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND................... 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............Problem-Z motor & WEC Error.
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................Problem - Broken Receive Indexer belt,Mask loader Error. 
NIKON 9.................Shutdown-.
SVGCOAT................ .
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH............... 
ULTRATECH2 ............. 
UVCURE..................
WBMISCRES...............
YES OVEN................






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