Litho AM Daily Report 11/21/06

Vilanova vilanova at stanford.edu
Tue Nov 21 08:56:04 PST 2006


**Litho Tools Status*                         

*11/21/06**


AFM....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND................... 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON................... 
NIKON 9.................
SVGCOAT................ 
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH............... 
ULTRATECH2 ............. 
UVCURE..................
WBMISCRES...............
YES OVEN................





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