From vilanova at stanford.edu Tue Oct 3 07:34:09 2006 From: vilanova at stanford.edu (Vilanova) Date: Tue, 03 Oct 2006 07:34:09 -0700 Subject: Litho AM Daily Report 10/03/06 Message-ID: <452274E1.3010206@stanford.edu> *Litho Tools Status* *10/03/06* AFM.....................Shutdown-PC corrupted. BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1...................Problem- System Corrupted. NANO2................... NIKON...................Shutdown-CWR Hard Disk Corrupted. NIKON 9.................Shutdown- Flat Finder,Stage Error. SVGCOAT.................Problem- Small EBR Splash. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem- Can't Find Y Mark On Run Mode #2. ULTRATECH2 ............. UVCURE.................. WBMISCRES............... YES OVEN................ From vilanova at stanford.edu Wed Oct 4 07:43:14 2006 From: vilanova at stanford.edu (Vilanova) Date: Wed, 04 Oct 2006 07:43:14 -0700 Subject: Litho AM Daily Report 10/04/06 Message-ID: <4523C882.3070503@stanford.edu> *Litho Tools Status* *10/04/06* AFM.....................Shutdown-PC corrupted. BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Shutdown-CWR Hard Disk Corrupted. NIKON 9.................Shutdown- Flat Finder,Stage Error. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2 ............. UVCURE.................. WBMISCRES............... YES OVEN................ From changyol at snf.stanford.edu Mon Oct 9 07:44:00 2006 From: changyol at snf.stanford.edu (chang lee) Date: Mon, 9 Oct 2006 07:44:00 -0700 Subject: daily report on 10/09/06 Message-ID: <004201c6ebb1$60d07210$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/09/06 From: Changyol< changyol at snf.stanford.edu> Date: wed, 10-09-2006 07:20 -------------------------------------------------------------------------------- Litho Tools Status* 10/09/06/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............status on yellow for low intensityKSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON................... working on Winchester drive at their facility. Try with loaner,but we waiting for emulator.NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................status on yellow(little splash of ebr on wafers)SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 .............status on yellow. Uneven expose on left to right side of pattern. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From clee3 at stanford.edu Tue Oct 10 07:30:53 2006 From: clee3 at stanford.edu (chang lee) Date: Tue, 10 Oct 2006 07:30:53 -0700 Subject: Daily report Message-ID: <001c01c6ec78$b42608e0$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/10/06 From: Changyol< changyol at snf.stanford.edu> Date: wed, 10-10-2006 07:20 -------------------------------------------------------------------------------- Litho Tools Status* 10/10/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON................... working on Winchester drive at their facility. Try with loaner.NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................status on yellow(little splash of ebr on wafers)SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 .............status on yellow. Uneven expose on left to right side of pattern. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 10 15:49:56 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Tue, 10 Oct 2006 15:49:56 -0700 Subject: Call for Papers - 10th Annual NSTI Nanotech Conference Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. ***Visit http://www.nsti.org/Nanotech2007 for submission details*** The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6802141K at spirit.sparklist.com From changyol at snf.stanford.edu Wed Oct 11 07:29:59 2006 From: changyol at snf.stanford.edu (chang lee) Date: Wed, 11 Oct 2006 07:29:59 -0700 Subject: daily report on 10/11/06 Message-ID: <001801c6ed41$c0508f40$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/11/06 From: Changyol< changyol at snf.stanford.edu> Date: wed, 10-11-2006 07:20 -------------------------------------------------------------------------------- Litho Tools Status* 10/11/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON................... working on Winchester drive at their facility. Try with loaner.NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 ............. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Thu Oct 12 07:39:59 2006 From: changyol at snf.stanford.edu (chang lee) Date: Thu, 12 Oct 2006 07:39:59 -0700 Subject: daily report for litho area Message-ID: <002201c6ee0c$501353e0$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/12/06 From: Changyol< changyol at snf.stanford.edu> Date: thursday, 10-12-2006 07:20 -------------------------------------------------------------------------------- Litho Tools Status* 10/12/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON................... working on Winchester drive at their facility. Try with loaner.NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................still have back splash on center of wafers.SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............wafer loading problem.ULTRATECH2 ............. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Oct 12 10:26:32 2006 From: nanotech at nsti.org (Nano World News) Date: Thu, 12 Oct 2006 10:26:32 -0700 Subject: Nano World News October 2006 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6802141K at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Fri Oct 13 07:31:45 2006 From: changyol at snf.stanford.edu (chang lee) Date: Fri, 13 Oct 2006 07:31:45 -0700 Subject: daily report on 10/13/06 Message-ID: <002201c6eed4$54a4c600$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/13/06 From: Changyol< changyol at snf.stanford.edu> Date: Friday, 10-13-2006 07:20 -------------------------------------------------------------------------------- Litho Tools Status* 10/13/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................no high voltage supply as per user.FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON................... working on Winchester drive at their facility. Try with loaner.NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................still have back splash on center of wafers.SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............wafer loading problem.ULTRATECH2 ............. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 17 16:08:30 2006 From: nanotech at nsti.org (SEMI) Date: Tue, 17 Oct 2006 16:08:30 -0700 Subject: SEMI NanoForum 2006 Message-ID: An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Fri Oct 20 06:47:35 2006 From: vilanova at stanford.edu (Vilanova) Date: Fri, 20 Oct 2006 06:47:35 -0700 Subject: Litho AM Daily Report 10/20/06 Message-ID: <4538D377.7080303@stanford.edu> *Litho Tools Status* *10/20/06* AFM.....................Shutdown-PC corrupted. BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND................... FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1.................... NANO2................... NIKON...................Shutdown-Waiting for Mahnaz Qualification. NIKON 9.................Shutdown-. SVGCOAT.................Problem- Parts On order OPT ( 10-23-06) SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH................ ULTRATECH2 ............. UVCURE.................. WBMISCRES............... YES OVEN................ From changyol at snf.stanford.edu Tue Oct 24 07:38:04 2006 From: changyol at snf.stanford.edu (chang lee) Date: Tue, 24 Oct 2006 07:38:04 -0700 Subject: daily report on 10/24/06 Message-ID: <002401c6f77a$08d4c370$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/24/06 From: Changyol< changyol at snf.stanford.edu> Date: TUE, 10-24-2006 07:30 -------------------------------------------------------------------------------- Litho Tools Status* 10/24/06 AFM.....................status on red.(computer virus)BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON................... status on yellow.(wafer alinment issue) NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................still have back splash on center of wafers.waiting for parts.SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............status on yellow.(wafer tilt error issue)ULTRATECH2 ............. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Oct 25 10:49:55 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Wed, 25 Oct 2006 10:49:55 -0700 Subject: Call for Papers - 10th Annual NSTI Nanotech Conference Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Visit http://www.nsti.org/Nanotech2007 for submission details The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6802141K at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Thu Oct 26 07:30:22 2006 From: changyol at snf.stanford.edu (chang lee) Date: Thu, 26 Oct 2006 07:30:22 -0700 Subject: daily report on 10/26/06 Message-ID: <002001c6f90b$4a289d50$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/26/06 From: Changyol< changyol at snf.stanford.edu> Date: Thur, 10-26-2006 07:30 -------------------------------------------------------------------------------- Litho Tools Status* 10/26/06 AFM.....................status on red.(computer virus)BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON...................status on yellow.(receiver indexer does not go down when wafer coming,also sender indexer does not make home position) NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................still have back splash on center of wafers after replaced parts.still investigating.SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............status on red.(wwaiting for vendor on Monday)ULTRATECH2 ............. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Mon Oct 30 07:43:51 2006 From: changyol at snf.stanford.edu (chang lee) Date: Mon, 30 Oct 2006 07:43:51 -0800 Subject: daily report on 10/30/06 Message-ID: <003401c6fc3a$38226a00$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 10/30/06 From: Changyol< changyol at snf.stanford.edu> Date: Mon, 10-30-2006 07:30 -------------------------------------------------------------------------------- Litho Tools Status* 10/30/06 AFM.....................status on red.(computer virus)BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................status on yellow(overcurrent due to Z axis freeze up)KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON...................status on yellow.( problem with flat finder) NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................still have back splash on center of wafers after replaced parts.still investigating.SVGCOAT2................SVGDEV..................status on yellow(broken wafers)SVGDEV2.................ULTRATECH...............status on red.(waiting for vendor on Monday)ULTRATECH2 ............. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: