From vilanova at stanford.edu Fri Sep 1 10:55:40 2006 From: vilanova at stanford.edu (Vilanova) Date: Fri, 01 Sep 2006 10:55:40 -0700 Subject: Litho AM Daily Report 9/1/06 Message-ID: <44F8741C.7090009@stanford.edu> Litho Tools Status* *09/01/06* AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND..................Shutdown-Top heater not Working,Svg Tech will be here 9/6/06. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Shutdown- Broken Mask transfer Belts,I've order the belts. NIKON 9.................Shutdown- Flat Finder,Stage Error. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From vilanova at stanford.edu Wed Sep 6 07:51:09 2006 From: vilanova at stanford.edu (Vilanova) Date: Wed, 06 Sep 2006 07:51:09 -0700 Subject: Litho AM Daily Report 9/6/06 Message-ID: <44FEE05D.2000304@stanford.edu> Litho Tools Status* 09/06/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND..................Shutdown-Top heater not Working,Svg Tech will be here 9/6/06. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Shutdown- Broken Mask transfer Belts,I've order the belts. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From vilanova at stanford.edu Thu Sep 7 08:26:47 2006 From: vilanova at stanford.edu (Vilanova) Date: Thu, 07 Sep 2006 08:26:47 -0700 Subject: Litho AM Daily Report 9/7/06 Message-ID: <45003A37.4090508@stanford.edu> Litho Tools Status* 09/07/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND..................Shutdown-Waiting for Parts from vendor. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Shutdown- Broken Mask transfer Belts,Waiting for belts to arrive. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From nanotech at nsti.org Mon Sep 11 08:52:08 2006 From: nanotech at nsti.org (NSTI) Date: Mon, 11 Sep 2006 08:52:08 -0700 Subject: Small Times NanoCon International 2006 Message-ID: An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Tue Sep 12 06:57:37 2006 From: vilanova at stanford.edu (Vilanova) Date: Tue, 12 Sep 2006 06:57:37 -0700 Subject: Litho AM Daily Report 9/12/06 Message-ID: <4506BCD1.5060003@stanford.edu> Litho Tools Status* 09/12/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1...................Shutdown-Corrupt System Software System. NANO2................... NIKON...................Shutdown- Belts Installation In progress. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH............... ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From vilanova at stanford.edu Wed Sep 13 09:14:25 2006 From: vilanova at stanford.edu (Vilanova) Date: Wed, 13 Sep 2006 09:14:25 -0700 Subject: Litho AM Daily Report 9/13/06 Message-ID: <45082E61.1040600@stanford.edu> Litho Tools Status* 09/13/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1...................Shutdown-Corrupt System Software. NANO2................... NIKON...................Shutdown- Belts Installation In progress. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem - 1.0mm Left side out of focus. ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From vilanova at stanford.edu Fri Sep 15 09:50:29 2006 From: vilanova at stanford.edu (Vilanova) Date: Fri, 15 Sep 2006 09:50:29 -0700 Subject: Litho AM Daily report 9/15/06 Message-ID: <450AD9D5.3090101@stanford.edu> Litho Tools Status* 09/15/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1................... NANO2................... NIKON...................Shutdown- Installation In progress. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem - 1.0mm Left side out of focus. ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From vilanova at stanford.edu Mon Sep 18 10:44:31 2006 From: vilanova at stanford.edu (Vilanova) Date: Mon, 18 Sep 2006 10:44:31 -0700 Subject: Litho AM Daily Report 9/18/06 Message-ID: <450EDAFF.3050705@stanford.edu> Litho Tools Status* 09/18/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................*Shutdown- Temperature, Air system Error* LITHOSOLV............... MASKSCRUB............... NANO1...................Problem- Intermitent Software Problem. NANO2................... NIKON...................Problem- Hard Drive Intermitent Problem. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem - 1.0mm Left side out of focus. ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ **** From vilanova at stanford.edu Tue Sep 19 08:40:19 2006 From: vilanova at stanford.edu (Vilanova) Date: Tue, 19 Sep 2006 08:40:19 -0700 Subject: Litho AM Daily Report 9/19/06 Message-ID: <45100F63.6030504@stanford.edu> Litho Tools Status* 09/19/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................*Shutdown- Temperature, Air system Error* LITHOSOLV............... MASKSCRUB............... NANO1...................Problem- Intermitent Software Problem. NANO2................... NIKON...................Problem- Hard Drive Intermitent Problem. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem - 1.0mm Left side out of focus. ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From changyol at snf.stanford.edu Thu Sep 21 07:39:15 2006 From: changyol at snf.stanford.edu (chang lee) Date: Thu, 21 Sep 2006 07:39:15 -0700 Subject: litho daily report on 9/21/06 Message-ID: <000a01c6dd8b$bb4aec40$216540ab@snf15f76a743ab> Litho Tools Status* 09/20/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND..................machine shut down for waiting of top heater t/c unit. part will be in 9/21/06 FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................*Shutdown- Temperature, Air system Error* LITHOSOLV............... MASKSCRUB............... NANO1...................Problem- Intermitent Software Problem. NANO2................... NIKON...................Problem- Hard Drive Intermitent Problem. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem - 1.0mm Left side out of focus. ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at stanford.edu Fri Sep 22 07:47:38 2006 From: vilanova at stanford.edu (Vilanova) Date: Fri, 22 Sep 2006 07:47:38 -0700 Subject: Litho AM Daily Report 9/22/06 Message-ID: <4513F78A.2090106@stanford.edu> Litho Tools Status* 09/22/06 AFM..................... BLUE M.................. DEKTAK CLEAN............ DEKTAK AU............... DNS..................... ELLIPSOMETER............ ELP1.................... ELP2.................... EVALIGN................. EVIMPRINT............... EVBOND.................. FUSION.................. LAURELL L............... LAURELL R............... HEADWAY2................ KARLSUSS................ KARLSUSS2............... KSBONDER................ LITHOSOLV............... MASKSCRUB............... NANO1...................Problem- Intermitent Software Problem. NANO2................... NIKON...................Problem- Hard Drive Intermitent Problem. NIKON 9................. SVGCOAT................. SVGCOAT2................ SVGDEV.................. SVGDEV2................. ULTRATECH...............Problem - 1.0mm Left side out of focus. ULTRATECH2 .............Shutdown. UVCURE.................. WBMISCRES............... YES OVEN................ From changyol at snf.stanford.edu Mon Sep 25 07:38:23 2006 From: changyol at snf.stanford.edu (chang lee) Date: Mon, 25 Sep 2006 07:38:23 -0700 Subject: daily report on 9/25/06 Message-ID: <001901c6e0b0$465aa790$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 9/25/06 From: Changyol< changyol at snf.stanford.edu> Date: mon, 25-09-2006 07:30 -------------------------------------------------------------------------------- Litho Tools Status* 09/25/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................NANO2...................NIKON...................Shutdown as per FSR. NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 .............status on yellow( waiting for new meter) UVCURE..................WBMISCRES...............YES OVEN................ Nanometric............. Status on yellow,but machine running good so Far. -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Tue Sep 26 07:36:16 2006 From: changyol at snf.stanford.edu (chang lee) Date: Tue, 26 Sep 2006 07:36:16 -0700 Subject: daily report Message-ID: <001401c6e179$24c301d0$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 9/26/06 From: Changyol< changyol at snf.stanford.edu> Date: mon, 26-09-2006 07:30 -------------------------------------------------------------------------------- Litho Tools Status* 09/26/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................status on yellow,but machine running good so far and keep eye on it.NANO2...................NIKON...................Shutdown as per FSR.( waiting for vendor to come in) NIKON 9.................shutdown for further action.( still have an Wafer loader problem) SVGCOAT.................SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 .............status on yellow. Working on focus issue.UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Wed Sep 27 07:29:11 2006 From: changyol at snf.stanford.edu (chang lee) Date: Wed, 27 Sep 2006 07:29:11 -0700 Subject: daily report Message-ID: <001001c6e241$52250fb0$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 9/27/06 From: Changyol< changyol at snf.stanford.edu> Date: wed, 27-09-2006 07:30 -------------------------------------------------------------------------------- Litho Tools Status* 09/27/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................status on yellow,but machine running good so far and keep eye on it.NANO2...................NIKON...................Shutdown as per FSR.( waiting for vendor to come in) NIKON 9.................shutdown for further action.( still have an Wafer loader problem) try to get new eprom chip with download of parameter( U21-2 chip on A25 board at wafer loader) SVGCOAT.................SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 .............status on yellow. Working on focus issue and auto loader problem.UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Sep 27 11:56:58 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Wed, 27 Sep 2006 11:56:58 -0700 Subject: Call for Papers - NSTI Nanotech 2007 Message-ID: Nanotech 2007 May 20-24, Santa Clara, California http://www.nsti.org/Nanotech2007 Abstracts Due: November 17th, 2006 The 10th annual NSTI Nanotech 2007, the premier nanotechnology conference and trade show in the U.S., will take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Join 4,000 attendees, 400 exhibitors, 900 business & research presentations, and 100+ Nanotech Ventures. Nanotech 2007 will provide a special focus on the issues of scientific and engineering research developments that are leading to innovative new products, materials and tools that impact industry and understanding. Nanotech 2007 May 20-24, Santa Clara, California http://www.nsti.org/Nanotech2007 --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6802141K at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Thu Sep 28 07:27:00 2006 From: changyol at snf.stanford.edu (chang lee) Date: Thu, 28 Sep 2006 07:27:00 -0700 Subject: daily report Message-ID: <000e01c6e30a$2e720400$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 9/28/06 From: Changyol< changyol at snf.stanford.edu> Date: wed, 28-09-2006 07:30 -------------------------------------------------------------------------------- Litho Tools Status* 09/28/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................status on yellow,but machine running good so far and keep eye on it.NANO2...................NIKON...................vendor is here and working on hard drive. NIKON 9.................shutdown for further action.( still have an Wafer loader problem) try to get new eprom chip with download of parameter( U21-2 chip on A25 board at wafer loader) SVGCOAT.................spr 220 uniformity problem.SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 .............status on yellow. Still has very small scratch on wafer. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From changyol at snf.stanford.edu Fri Sep 29 07:24:19 2006 From: changyol at snf.stanford.edu (chang lee) Date: Fri, 29 Sep 2006 07:24:19 -0700 Subject: daily report Message-ID: <000c01c6e3d2$f8fd8780$216540ab@snf15f76a743ab> Subject: Litho AM Daily Report 9/29/06 From: Changyol< changyol at snf.stanford.edu> Date: wed, 29-09-2006 07:20 -------------------------------------------------------------------------------- Litho Tools Status* 09/29/06 AFM.....................BLUE M..................DEKTAK CLEAN............DEKTAK AU...............DNS.....................ELLIPSOMETER............ELP1....................ELP2....................EVALIGN.................EVIMPRINT...............EVBOND..................FUSION..................LAURELL L...............LAURELL R............... HEADWAY2................KARLSUSS................KARLSUSS2...............KSBONDER................LITHOSOLV...............MASKSCRUB...............NANO1...................status on yellow,but machine running good so far and keep eye on it.NANO2...................NIKON................... working on Winchester drive at their facility. NIKON 9.................shutdown for further action.( still have an Wafer loader problem) try to get new eprom chip with download of parameter( U21-2 chip on A25 board at wafer loader) SVGCOAT.................little splash of ebr on wafers.SVGCOAT2................SVGDEV..................SVGDEV2.................ULTRATECH...............ULTRATECH2 .............status on yellow. Still has very small scratch on wafer. UVCURE..................WBMISCRES...............YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: