AM Litho Report 4/2/07

Vilanova vilanova at stanford.edu
Mon Apr 2 08:20:47 PDT 2007


**Litho AM Report 
4/02/07*
AFM....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND................... 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............Problem-Intensity and Uniformity needs to be checked.
KSBONDER...............
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................  
SVGCOAT................Problem- HMDS Leak,.
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............
UVCURE..................
WBMISCRES...............
YES OVEN................






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