Litho AM Daily Report 1/03/07

Vilanova vilanova at stanford.edu
Wed Jan 3 07:03:31 PST 2007


1/03/07**


AFM....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND................... 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON................... 
SVGCOAT................Shutdown-Track motherboard not responding,Vendor WIll be here today 1/3/07 
SVGCOAT2...............Shutdown Track Motherboard not responding.Vendor will be here 1/03/07
SVGDEV..................
SVGDEV2.................
ULTRATECH...............Shutdown-Still having some issues with the system.. 
UVCURE..................
WBMISCRES...............
YES OVEN................





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