Litho AM Daily Report 1/4/07

Vilanova vilanova at stanford.edu
Thu Jan 4 07:58:31 PST 2007


1/04/07**


AFM....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND................... 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON................... 
SVGCOAT................Shutdown- Vendor will be here today  1/4/07 to replace broken parts. 
SVGCOAT2...............Shutdown -Vendor will be here today 1/4/07 to work on both systems.
SVGDEV..................
SVGDEV2.................
ULTRATECH............... 
UVCURE..................
WBMISCRES...............
YES OVEN................





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