Litho AM Daily Report 1/17/07

Vilanova vilanova at stanford.edu
Wed Jan 17 11:34:11 PST 2007


1/17/07
AFM....................
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND................... 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON.............Problem-( Focus Error ) Can't Focus On both Sides At the same time. 
SVGCOAT................Problem- HMDS Leak . 
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH............... 
UVCURE..................
WBMISCRES...............
YES OVEN................







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