Litho AM Report 5/1/7/07

Vilanova vilanova at stanford.edu
Thu May 17 09:23:21 PDT 2007


**Litho AM Report 
5/17/07*
AFM.....................
ASML....................Testing in progress.
BLUE M..................
DEKTAK CLEAN............
DEKTAK AU...............
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND................... 
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER...............
LITHOSOLV...............
MASKSCRUB...............
NANO1...................
NANO2...................
NIKON...................  
SVGCOAT................Problem- HMDS Leak,.
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............problem- Bad Focus on left side.
UVCURE..................
WBMISCRES...............
YES OVEN................Problem- Defective Latch. 






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