500um square in reticle?
cmcg at stanford.edu
Wed Jun 9 23:52:02 PDT 2010
This would be for ASML.
----- Original Message -----
From: "Chris McGuinness" <cmcg at stanford.edu>
To: litho at snf.stanford.edu
Sent: Wednesday, June 9, 2010 11:49:45 PM
Subject: 500um square in reticle?
Does anyone happen to have a 500um (wafer level) square in a reticle
that I can use briefly tomorrow afternoon? I'd be greatly in your debt,
and would even buy you lunch or beer, or both :) If so can you tell me
the coordinates so I can add a layer in my jobfile?
More information about the litho