Morning Litho Status Report 11/8

[Gary Sosa]

Good Morning All...

   Here is the morning Litho report.

ASML Stepper- User reports that a wafer may be missing in the tool. Will 
look for wafer and check reports

Karl Suss 2- User reports that mask dropped after exposure and displayed 
a "Dangerous Condition" error message.
                        Will investigate problem.

SVG Coat1- User reports poor spin on 3612 resist. Will check out on 
morning rounds

EVAlign- User reports a theta rotation problem. Will investigate.

   Please check back in Coral for the most current updates and tool status.

   Thanks.. The Litho Team

*/Photolithography Area Status/*

	

	

*/Monday, November 08, 2010/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

EV Bonder- Changing pressure plate to Quartz this afternoon

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*DOWN*

	

Possible wafer lost

	

1

EVAlign

	

*PROBLEM*

	

Theta rotation problem

	

4

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*DOWN*

	

System in unstable state

	

2

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*UP*

	

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Problem*

	

Poor spin

	

3

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

5

SVGCoat2

	

3612 Process

	

*Problem*

	

Intermittent lifter problem at vp station

	

6

955-0.7 Process

	

*Problem*

	

	

220-3 Process

	

*Problem*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

Replaced W/ Super Nuova HP

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

7

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*UP*

	

Bond chuck rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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