From gsosa at stanford.edu  Mon Oct 18 07:09:48 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Mon, 18 Oct 2010 07:09:48 -0700
Subject: testing the email address
Message-ID: <4CBC552C.9020501@stanford.edu>

  Testing Email Address


From gsosa at stanford.edu  Mon Oct 18 07:22:01 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Mon, 18 Oct 2010 07:22:01 -0700
Subject: Testing report- Please disregard
Message-ID: <4CBC5809.9010905@stanford.edu>



*/Photolithography Area Status/*

	

	

*/Monday, October 18, 2010/*

	

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

This is just a test report. Please disregard.

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

	

2

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

1

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*UP*

	

	

Fusion

	

*UP*

	

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/ Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*UP*

	

	

*/ Microscpoes-/*

	

	

	

#1 Leica/

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*PROBLEM*

	

Repairing computer for camera

	

3

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*UP*

	

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Mon Oct 18 10:55:51 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Mon, 18 Oct 2010 10:55:51 -0700
Subject: Litho Status 10/18
Message-ID: <4CBC8A27.7010802@stanford.edu>




*/Photolithography Area Status/*

	

	

*/Monday, October 18, 2010/*

	

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Process clinic today at 2:00PM

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

UV lamp replaced 10/18

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

5

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Problem*

	

Poor spin, suckback

	

2

220-7 Process

	

*Problem*

	

Optimizing process

	

1

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

3

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

4

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/ Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*UP*

	

	

*/ Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*PROBLEM*

	

Repairing computer for camera

	

6

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

1 bond chuck out for rebuild by EVG

	

7

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Tue Oct 19 07:05:01 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Tue, 19 Oct 2010 07:05:01 -0700
Subject: Morning report, Tuesday 10/19
Message-ID: <4CBDA58D.3010603@stanford.edu>

  Good morning all. Here is the Litho morning report.


*/Photolithography Area Status/*

	

	

*/Tuesday, October 19, 2010/*

	

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Mario out today

Litho ADCOM Meeting-9:00 Allen 201

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*DOWN*

	

Screen locked up

	

1

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*UP*

	

UV lamp replaced 10/18

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

6

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Problem*

	

Poor spin, suckback

	

3

220-7 Process

	

*Problem*

	

Optimizing process

	

2

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

4

Blue M 110 C

	

*UP*

	

	

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

5

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/ Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*UP*

	

	

*/ Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

PC disinfected and reinstalled

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

1 bond chuck out for rebuild by EVG

	

7

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Wed Oct 20 07:28:28 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Wed, 20 Oct 2010 07:28:28 -0700
Subject: Litho Morning Statas 10/20
Message-ID: <4CBEFC8C.3010901@stanford.edu>

  Good morning All. Here is the Litho Morning Status



*/Photolithography Area Status/*

	

	

*/Wednesday, October 20, 2010/*

	

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Staff Lab Cleanup- Preparation for Campus Cleanup, 8:00 to 9:00 AM

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Software Bug, From 04/2010

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*PROBLEM*

	

UV lamp replaced 10/18

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

1

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

3

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

4

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/ Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

2

*/ Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

PC disinfected and reinstalled

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

1 bond chuck out for rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Thu Oct 21 07:06:20 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Thu, 21 Oct 2010 07:06:20 -0700
Subject: Litho Morning Status Report 10/21
Message-ID: <4CC048DC.5020808@stanford.edu>

Good Morning All. Here is the Litho morning report



*/Photolithography Area Status/*

	

	

*/Thursday, October 21, 2010/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*PROBLEM*

	

Software Bug, From 04/2010

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*PROBLEM*

	

UV lamp replaced10/18

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*DOWN*

	

Cleaning system and exhaust

	

3

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

1

SVGCoat2

	

3612 Process

	

*Problem*

	

Poor spin

	

2

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

5

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

6

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

PC disinfected and reinstalled

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

1 bond chuck out for rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Fri Oct 22 07:20:36 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Fri, 22 Oct 2010 07:20:36 -0700
Subject: Litho Area status Report 10/22
Message-ID: <4CC19DB4.4040702@stanford.edu>

Good Morning All. Here is the Morning Litho status report.


*/Photolithography Area Status/*

	

	

*/Friday, October 22, 2010/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*PROBLEM*

	

UV lamp replaced10/18

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

3

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

1

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

5

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

6

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*PROBLEM*

	

Camera Apps software issue

	

2

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

1 bond chuck out for rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Mon Oct 25 07:30:44 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Mon, 25 Oct 2010 07:30:44 -0700
Subject: Morning Litho Status Report 10/25
Message-ID: <4CC59494.2080106@stanford.edu>

Good Morning All.  Here is the Litho Status Report.

  Karl Suss#2- User reports a theta rotation problem. Will investigate 
and repair as needed
  SVG Coat #1-  User reports no EBR dispensing. Will check out system 
and repair as needed
  SVG Coat #2- User reports that wafers not transferring from sender to 
VP. Will check out and repair as needed.

   Please check back in Coral for the current status of tools.


    Thanks.... The Litho Team


*/Photolithography Area Status/*

	

	

*/Monday, October 25, 2010/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

EVG Bonder Back to Quartz pressure plate today

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*PROBLEM*

	

Theta rotation problem

	

3

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

4

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Problem*

	

No EBR dispensing

	

1

3617 Process

	

*Problem*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

SVGCoat2

	

3612 Process

	

*Problem*

	

Transfer problem from sender to VP

	

2

955-0.7 Process

	

*Problem*

	

	

220-3 Process

	

*Problem*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

6

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

7

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

5

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*PROBLEM*

	

Camera Apps software issue

	

8

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

1 bond chuck out for rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Tue Oct 26 07:25:04 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Tue, 26 Oct 2010 07:25:04 -0700
Subject: Litho Morning Status Report 10/26
Message-ID: <4CC6E4C0.10004@stanford.edu>

Good Morning All....

   Here is the Litho Status report.

SVG Coat 1: 3612 process down for suckback issues. Will continue to 
troubleshoot and resolve.

Olympus Microscope w/Camera: Computer- 200+ infections removed, Camera 
software working correctly
with Admin Login. All user data in tact.  A/V software installed. Will 
do regular updates and scans to prevent/
minimize further infections.

Thanks... Litho Team

*/Photolithography Area Status/*

	

	

*/Tuesday, October 26, 2010/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Staff -Continued preparations for Thursday's "Campus Cleanup", 9:00AM - ?

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*PROBLEM*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

4

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Down*

	

No Suckback

	

1

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

2

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

5

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

6

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

3

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

Camera App and Data OK

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

1 bond chuck out for rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Wed Oct 27 07:19:50 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Wed, 27 Oct 2010 07:19:50 -0700
Subject: Litho Morning Status  10/27
Message-ID: <4CC83506.3080303@stanford.edu>

Good Morning All....

   Here is the Litho morning status report.

Karl Suss 1: User accidentally depressed the EMO. Will power up 
tool/lamp and do a full hardware
reset and lamp check.

SVG Dev 1: Wafer transfer problem. Will investigate and repair as needed

EV Bonder: User reports top electrode temperature problem. Will 
investigate. May need to replace the
heater lamps.

   Please check back in Coral for current status and updates.

  Thanks....  The Litho Team



*/Photolithography Area Status/*

	

	

*/Wednesday, October 27, 2010/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Mario on vacation today

Staff IRT meeting- 9:00 AM

*/Exposure Tools/*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*DOWN*

	

EMO Accidentally depressed

	

1

Karl Suss 2

	

*PROBLEM*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

5

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

4

SVGCoat2

	

3612 Process

	

*Up*

	

	

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*DOWN*

	

Wafer transfer problem

	

2

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

7

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

8

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

6

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

Camera App and Data OK

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Top Heater problem

	

3

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From gsosa at stanford.edu  Thu Oct 28 07:23:17 2010
From: gsosa at stanford.edu (Gary Sosa)
Date: Thu, 28 Oct 2010 07:23:17 -0700
Subject: Litho Status Report 10/28
Message-ID: <4CC98755.8020207@stanford.edu>

Good morning All..

  Here is the morning Litho Status Report

ASML Stepper will be converted to 6" today as per a user request. 
Stepper will be converted back to
4" this afternoon.

SVG Coat 2: User reported that wafers not moving out of the sender. Will 
investigate and repair

   Please check back in Coral for current tool status and updates.

    Thanks.. Litho Team


*/Photolithography Area Status/*

	

	

*/Thursday, October 28, 2010/*

	

	

	

	

*/General Information / Lab Activities/*

	

	

	

Campus cleanup today!

ASML Stepper converted to 6" today

*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	

6" conversion

	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*PROBLEM*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

3

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

2

SVGCoat2

	

3612 Process

	

*Problem*

	

Wafer transfer problem

	

1

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

5

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

6

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

Camera App and Data OK

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Bond chuck rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	


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From vilanova at stanford.edu  Fri Oct 29 08:43:00 2010
From: vilanova at stanford.edu (Mario Vilanova)
Date: Fri, 29 Oct 2010 08:43:00 -0700
Subject: Litho Status Report 10/29/2010
Message-ID: <4CCAEB84.8000904@stanford.edu>


> Good morning All..
>
>  Here is the morning Litho Status Report
>
> ASML Stepper , HotSpot At Top Center  Chuck, JOey From ASML will be 
> here to clean it up.
>
>
>   Please check back in Coral for current tool status and updates.
>
>    Thanks.. Litho Team
>
>
> */Photolithography Area Status/*
>
> 	
>
> 	
>
> */Friday, October 29, 2010/*
>
> 	
>
> 	
>
> 	
>
> 	
>
>
> 	
>
> 	
>
> 	
>
>
>
> */Exposure Tools/**//*
>
> 	
>
> Status
>
> 	
>
> Comments
>
> 	
>
> Priority
>
> ASML Stepper
>
> 	
>
> *UP*
>
> 	
>
> 6" conversion
>
> 	
>
> EVAlign
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> EVAlign2
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> EVG-Imprint
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Karl Suss 1
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Karl Suss 2
>
> 	
>
> *PROBLEM*
>
> 	
>
> 	
>
> */Manual Coaters/*
>
> 	
>
> Status
>
> 	
>
> 	
>
> EVGSpraycoat
>
> 	
>
> *PROBLEM*
>
> 	
>
> Wobbly chuck
>
> 	
>
> 3
>
> Headway
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Laurel
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Coaters/*
>
> 	
>
> Process Status
>
> 	
>
> 	
>
> SVGCoat
>
> 	
>
> 3612 Process
>
> 	
>
> *Up*
>
> 	
>
> 	
>
> 3617 Process
>
> 	
>
> *Up*
>
> 	
>
> 	
>
> 220-7 Process
>
> 	
>
> *Problem*
>
> 	
>
> Optimizing process
>
> 	
>
> 2
>
> SVGCoat2
>
> 	
>
> 3612 Process
>
> 	
>
> *Up*
>
> 	
>
>
> 	
>
>
> 955-0.7 Process
>
> 	
>
> *Up*
>
> 	
>
> 	
>
> 220-3 Process
>
> 	
>
> *Up*
>
> 	
>
> 	
>
> */Developers/*
>
> 	
>
> Status
>
> 	
>
> 	
>
> SVGDEV
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> SVGDEV2
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Ovens / Hotplates/*
>
> 	
>
> Status
>
> 	
>
> 	
>
> BLUEM
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Blue M 90 C.
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Blue M 110 C
>
> 	
>
> *PROBLEM*
>
> 	
>
> Temperature Drift. Controller on order
>
> 	
>
> 5
>
> Blue M 150 C
>
> 	
>
> *PROBLEM*
>
> 	
>
> Temperature Drift. Controller on order
>
> 	
>
> 6
>
> Fusion
>
> 	
>
> *DOWN*
>
> 	
>
> Hotplate experiments
>
> 	
>
> UV-Cure
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> White-Oven
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> YES Vapor Prime
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Hotplates- /*
>
> 	
>
> 	
>
> 	
>
> Laurel-left
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Laurel- right
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Headway
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Torrey Pines- left
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> 90 Deg C
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> 115 Deg C
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Torrey Pines- Right
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Metrology/Inspection/*
>
> 	
>
> Status
>
> 	
>
> 	
>
> Alpha-Step 500
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Nanospec 2-Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Nanospec 1-Etch
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> P2 Profiler
>
> 	
>
> *PROBLEM*
>
> 	
>
> Error -11 on Unload, reset to recover
>
> 	
>
> 4
>
> */Microscpoes-/*
>
> 	
>
> 	
>
> 	
>
> #1 Leica/Analytical
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #2 Ergolux/Drytek2
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #3 Olympus/Litho
>
> 	
>
> *UP*
>
> 	
>
> Camera App and Data OK
>
> 	
>
> #4 Nikon Optiphot/Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #5 Nikon/Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #6 Leitz/Bosch
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #7 Leitz/Diffusion
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #8 Olympus/Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #9 Olympus/Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Miscellaneous/*
>
> 	
>
> Status
>
> 	
>
> 	
>
> EVBond
>
> 	
>
> *PROBLEM*
>
> 	
>
> Bond chuck rebuild by EVG
>
> 	
>
> KSBonder
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> KSCoat
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Litho SRD
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> 	
>
> 	
>
> 	
>
> 	
>
> 	
>
> 	
>
>
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From vilanova at stanford.edu  Fri Oct 29 10:19:42 2010
From: vilanova at stanford.edu (Mario Vilanova)
Date: Fri, 29 Oct 2010 10:19:42 -0700
Subject: Litho Status  Report 10/29/2010
Message-ID: <4CCB022E.9040403@stanford.edu>

*/
/*

*/
Photolithography Area Status/*

	

	

*/Friday, October 29, 2010/*


	

	

	

	


	

	

	



*/Exposure Tools/**//*

	

Status

	

Comments

	

Priority

ASML Stepper

	

*UP*

	
	

EVAlign

	

*UP*

	

	

EVAlign2

	

*UP*

	

	

EVG-Imprint

	

*UP*

	

	

Karl Suss 1

	

*UP*

	

	

Karl Suss 2

	

*PROBLEM*

	

	

*/Manual Coaters/*

	

Status

	

	

EVGSpraycoat

	

*PROBLEM*

	

Wobbly chuck

	

3

Headway

	

*UP*

	

	

Laurel

	

*UP*

	

	

*/Coaters/*

	

Process Status

	

	

SVGCoat

	

3612 Process

	

*Up*

	

	

3617 Process

	

*Up*

	

	

220-7 Process

	

*Problem*

	

Optimizing process

	

2

SVGCoat2

	

3612 Process

	

*Problem*

	

Wafer transfer problem

	

1

955-0.7 Process

	

*Up*

	

	

220-3 Process

	

*Up*

	

	

*/Developers/*

	

Status

	

	

SVGDEV

	

*UP*

	

	

SVGDEV2

	

*UP*

	

	

*/Ovens / Hotplates/*

	

Status

	

	

BLUEM

	

*UP*

	

	

Blue M 90 C.

	

*UP*

	

	

Blue M 110 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

5

Blue M 150 C

	

*PROBLEM*

	

Temperature Drift. Controller on order

	

6

Fusion

	

*DOWN*

	

Hotplate experiments

	

UV-Cure

	

*UP*

	

	

White-Oven

	

*UP*

	

	

YES Vapor Prime

	

*UP*

	

	

*/Hotplates- /*

	

	

	

Laurel-left

	

*UP*

	

	

Laurel- right

	

*UP*

	

	

Headway

	

*UP*

	

	

Torrey Pines- left

	

*UP*

	

	

90 Deg C

	

*UP*

	

	

115 Deg C

	

*UP*

	

	

Torrey Pines- Right

	

*UP*

	

	

*/Metrology/Inspection/*

	

Status

	

	

Alpha-Step 500

	

*UP*

	

	

Nanospec 2-Litho

	

*UP*

	

	

Nanospec 1-Etch

	

*UP*

	

	

P2 Profiler

	

*PROBLEM*

	

Error -11 on Unload, reset to recover

	

4

*/Microscpoes-/*

	

	

	

#1 Leica/Analytical

	

*UP*

	

	

#2 Ergolux/Drytek2

	

*UP*

	

	

#3 Olympus/Litho

	

*UP*

	

Camera App and Data OK

	

#4 Nikon Optiphot/Litho

	

*UP*

	

	

#5 Nikon/Litho

	

*UP*

	

	

#6 Leitz/Bosch

	

*UP*

	

	

#7 Leitz/Diffusion

	

*UP*

	

	

#8 Olympus/Litho

	

*UP*

	

	

#9 Olympus/Litho

	

*UP*

	

	

*/Miscellaneous/*

	

Status

	

	

EVBond

	

*PROBLEM*

	

Bond chuck rebuild by EVG

	

KSBonder

	

*UP*

	

	

KSCoat

	

*UP*

	

	

Litho SRD

	

*UP*

	

	

	

	

	

	

	

	

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