Litho Status Report 10/29/2010

Mario Vilanova vilanova at stanford.edu
Fri Oct 29 08:43:00 PDT 2010


> Good morning All..
>
>  Here is the morning Litho Status Report
>
> ASML Stepper , HotSpot At Top Center  Chuck, JOey From ASML will be 
> here to clean it up.
>
>
>   Please check back in Coral for current tool status and updates.
>
>    Thanks.. Litho Team
>
>
> */Photolithography Area Status/*
>
> 	
>
> 	
>
> */Friday, October 29, 2010/*
>
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>
>
> */Exposure Tools/**//*
>
> 	
>
> Status
>
> 	
>
> Comments
>
> 	
>
> Priority
>
> ASML Stepper
>
> 	
>
> *UP*
>
> 	
>
> 6" conversion
>
> 	
>
> EVAlign
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> EVAlign2
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> EVG-Imprint
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Karl Suss 1
>
> 	
>
> *UP*
>
> 	
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> 	
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> Karl Suss 2
>
> 	
>
> *PROBLEM*
>
> 	
>
> 	
>
> */Manual Coaters/*
>
> 	
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> Status
>
> 	
>
> 	
>
> EVGSpraycoat
>
> 	
>
> *PROBLEM*
>
> 	
>
> Wobbly chuck
>
> 	
>
> 3
>
> Headway
>
> 	
>
> *UP*
>
> 	
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> 	
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> Laurel
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Coaters/*
>
> 	
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> Process Status
>
> 	
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> 	
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> SVGCoat
>
> 	
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> 3612 Process
>
> 	
>
> *Up*
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> 	
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> 	
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> 3617 Process
>
> 	
>
> *Up*
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> 	
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> 	
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> 220-7 Process
>
> 	
>
> *Problem*
>
> 	
>
> Optimizing process
>
> 	
>
> 2
>
> SVGCoat2
>
> 	
>
> 3612 Process
>
> 	
>
> *Up*
>
> 	
>
>
> 	
>
>
> 955-0.7 Process
>
> 	
>
> *Up*
>
> 	
>
> 	
>
> 220-3 Process
>
> 	
>
> *Up*
>
> 	
>
> 	
>
> */Developers/*
>
> 	
>
> Status
>
> 	
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> 	
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> SVGDEV
>
> 	
>
> *UP*
>
> 	
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> 	
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> SVGDEV2
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Ovens / Hotplates/*
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> 	
>
> Status
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> 	
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> BLUEM
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Blue M 90 C.
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Blue M 110 C
>
> 	
>
> *PROBLEM*
>
> 	
>
> Temperature Drift. Controller on order
>
> 	
>
> 5
>
> Blue M 150 C
>
> 	
>
> *PROBLEM*
>
> 	
>
> Temperature Drift. Controller on order
>
> 	
>
> 6
>
> Fusion
>
> 	
>
> *DOWN*
>
> 	
>
> Hotplate experiments
>
> 	
>
> UV-Cure
>
> 	
>
> *UP*
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> 	
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> 	
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> White-Oven
>
> 	
>
> *UP*
>
> 	
>
> 	
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> YES Vapor Prime
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Hotplates- /*
>
> 	
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> 	
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> 	
>
> Laurel-left
>
> 	
>
> *UP*
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> 	
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> 	
>
> Laurel- right
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Headway
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Torrey Pines- left
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> 90 Deg C
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> 115 Deg C
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Torrey Pines- Right
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Metrology/Inspection/*
>
> 	
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> Status
>
> 	
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> 	
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> Alpha-Step 500
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Nanospec 2-Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Nanospec 1-Etch
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> P2 Profiler
>
> 	
>
> *PROBLEM*
>
> 	
>
> Error -11 on Unload, reset to recover
>
> 	
>
> 4
>
> */Microscpoes-/*
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> #1 Leica/Analytical
>
> 	
>
> *UP*
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> 	
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> 	
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> #2 Ergolux/Drytek2
>
> 	
>
> *UP*
>
> 	
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> 	
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> #3 Olympus/Litho
>
> 	
>
> *UP*
>
> 	
>
> Camera App and Data OK
>
> 	
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> #4 Nikon Optiphot/Litho
>
> 	
>
> *UP*
>
> 	
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> 	
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> #5 Nikon/Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #6 Leitz/Bosch
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #7 Leitz/Diffusion
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #8 Olympus/Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> #9 Olympus/Litho
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> */Miscellaneous/*
>
> 	
>
> Status
>
> 	
>
> 	
>
> EVBond
>
> 	
>
> *PROBLEM*
>
> 	
>
> Bond chuck rebuild by EVG
>
> 	
>
> KSBonder
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> KSCoat
>
> 	
>
> *UP*
>
> 	
>
> 	
>
> Litho SRD
>
> 	
>
> *UP*
>
> 	
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>
>
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